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Metrology Systems

Critical Dimensional Measurement Systems Seeing and measuring the impossible
Optical Metrology Systems
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VIEW offers a full line of optical metrology systems for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.

Benchmark 250

A compact, high-accuracy dimensional measurement system 

Benchmark 300

High Performance Floor Model Optical Metrology System 

Benchmark 450

Exceptional value in a high-accuracy dimensional measurement system 

Benchmark XLT
Extra large format dimensional metrology system
Pinnacle 250
A high throughput, high-accuracy dimensional metrology system
Pinnacle Plus
Elevates Pinnacle performance to the next level
Summit 600/625/800
A large travel, high-accuracy dimensional measurement system
MicroLine AF
MicroLine AF
Offers exceptional linewidth and overlay measurement capability
MicroLine AF Plus
MicroLine AF Plus
Offers exceptional linewidth and overlay measurement capability

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