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Critical Dimensional Measurement Systems That Can See and Measure the Impossible
Large area, high-accuracy dimensional metrology system. High-speed linear motor drives, single or dual magnification fixed lens optics. Suited for measuring large footprint parts such as PCBs, stencils, flat panel displays, etching sheets, and mask patterns, as well as nested groups of smaller parts.
High Throughput, High-Accuracy Dimensional Metrology System featuring high-speed linear motor drives and single or dual magnification fixed lens optical system. Designed for high-volume operation in production environments ranging from cleanrooms to factory floors
Ultra-High Accuracy Dimensional Metrology System featuring high-speed linear motor drives, single magnification fixed optics, and high-performance Z-axis motion assembly. Designed for high-volume operation in production environments ranging from cleanrooms to factory floors.
High-Accuracy Benchtop Dimensional Metrology System. DC servo motor stage drives and single or dual magnification fixed lens optics.
High-Accuracy Floor Model Dimensional Metrology System. DC servo motor stage drives and single or dual magnification fixed lens optics.
Ultra-High Accuracy Critical Dimensional Metrology System. Combines the XYZ accuracy of linear motor drives with ultra-high magnification optics. Designed to measure wafers, masks, MEMS, and other micro-fabricated parts.