High-value, high-accuracy dimensional metrology system

The VIEW Benchmark™ 300 delivers VIEW performance with a large measuring envelope, dual magnification optics, and metrology-grade construction.
Capable of measuring 300mm wafers with high precision, this rugged floor model configuration provides maximum mechanical integrity and accuracy in the stage motion.
Standard
Optional
XYZ Travel

300 x 300 x 200 mm

300 x 600 x 200 mm

Load Capacity

30 kg

 
Imaging Optics

Single magnification, fixed lens optics with factory configurable back tube and field interchangeable front lens

Dual magnification, fixed lens optics with field interchangeable front lens

Metrology Camera

2.0 megapixel (1628 x 1236), digital, monochrome metrology camera

Color and other camera configurations are optionally available

Illumination

Programmable LED illumination system for coaxial through-the-lens surface light, below-the-stage backlight, and multi-color ring light with motorized incidence angle control

Grid Autofocus System
Sensor Options

Through-the-Lens (TTL) laser Rainbow ProbeTM off-axis white light range sensor

Measurement Modes
High Speed Move and Measure (MAM)
Continuous Image Capture (CIC)
FEATURES
Dual magnification optics and an optional through-the-lens (TTL) laser sensor make the Benchmark an ideal system for many applications including molded plastic parts, screen printer stencils, printed circuit boards, solder paste, epoxy glue dots, precision machined parts, and many others.

The Benchmark 300 operates with any of VIEW’s standard metrology software packages:

SUPPORT
info@viewmm.com

For system support status, please refer to:

Product Support Matrix

Ask us about a high-performance VIEW measurement system application study

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