Microline

high-performance critical dimensional measurement system.

The VIEW MicroLine® is a high-performance critical dimensional measurement system for wafers, masks, MEMS and other micro-fabricated devices in situations which do not require fully automated operation.

MicroLine systems feature the highest quality microscope optics, motorized autofocus, manually operated stages and fully programmable illumination and measurement recipes. Reflected illumination is standard and transmitted illumination is available as an option. MicroLine systems are capable of measuring bright and dark lines, semi-transparent layers, lines with irregular edges and other critical features.

Standard
Optional
XYZ Travel

MicroLine 1000 100 x 100 x 175
MicroLine 2000 200 x 200 x 175
MicroLine 3000 300 x 300 x 175

Metrology Camera
2.0 megapixel, digital, B&W metrology camera
1.4 megapixel, 2/3 inch, digital, monochrome Color and other camera configurations available upon request
XY Stage
Cross roller with manual coaxial positioning and quick release; Glass stage insert for use with transmitted light
Objective Lenses (Field Interchangable)
10X Bright Field 50X Bright Field

5X BF or BF/DF
10X BF or BF/DF
20X LWD, BF or BF/DF
100X LWD, BF or BF/DF
150X LWD, BF or BF/DF

Imaging Optics
Olympus Microscope optics, including horizontal bright field/dark field illuminator, five-objective motorized lens turret with DIC slot, tilt trinocular viewing system with optical crosshair, and standard 0.63X back tube with camera mount
Illumination
Programmable LED coaxial surface light and LED transmitted light with adjustable N.A. stop
FEATURES
The Benchmark 250 is well suited to measure many types of components, including molded plastic parts, machined parts, electronic assemblies, semiconductor packages, fiber optic components, disk media substrates, recording head dies, or semiconductor wafers up to 150 mm in diameter.

The Benchmark 250 operates with one or more of VIEW’s standard metrology software packages:

SUPPORT

(800) SOS-VIEW(767-8439)

viewmm-service@qvii.com

For system support status, please refer to:

Product Support Matrix

Application Study Performed on Your Parts

For a NO COST high-performance dimensional measurement systems application study

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