Precis
Ultra High Accuracy Critical Dimension Metrology System
VIEW Apex Precis combines the XYZ accuracy of VIEW systems with the ultra-high magnification optics of the MicroLine. Apex Precis features a microscope objective turret and a high performance Z-axis motion assembly to provide the best possible optical focus at extreme magnifications.
The most accurate XY stage VIEW has to offer combined with the versatile yet powerful objective turret creates a metrology machine for the most demanding applications.
標準
可選的
XYZ旅行
200 x 200 x 50 mm
Extended X axis, 300 mm; extended Z axis, 150 mm
承載量
10 kg
計量相機
Microscope optical system with manual 5-position objective lens turret, bright field / dark field imaging
Analyzer, Polarizer, and DIC
計量相機
2.0 megapixel (1628 x 1236), digital, monochrome metrology camera
Color and other high-resolution camera configurations are optionally available
照明
綠色 LED 同軸表面燈和 LED 透射台下燈,光源和強度可編程
白色 LED 同軸表面光和濾色器
特徵
- Microscope optics with 5-position objective lens turret with DIC slot
- High performance focus motion assembly
- High performance XY stage for accurate positioning and repeatability
- View Metrology Software (VMS)
- 元素軟件