Precis
Ultra High Accuracy Critical Dimension Metrology System
VIEW Precis combines the XYZ accuracy of VIEW systems with ultra-high magnification optics. Precis features a microscope objective turret and a high performance Z-axis motion assembly to provide the best possible optical focus at extreme magnifications.
The most accurate XY stage VIEW has to offer combined with the versatile yet powerful objective turret creates a metrology machine for the most demanding applications.
标准
可选的
XYZ 行程
200 x 200 x 50 mm
Extended X axis, 300 mm; extended Z axis, 150 mm
承载量
10 kg
计量相机
Microscope optical system with manual 5-position objective lens turret, bright field / dark field imaging
Analyzer, Polarizer, and DIC
计量相机
2.0 megapixel (1628 x 1236), digital, monochrome metrology camera
Color and other high-resolution camera configurations are optionally available
照明
绿色 LED 同轴表面灯和 LED 透射台下灯，光源和强度可编程
白色 LED 同轴表面光和滤色器
特征
- Microscope optics with 5-position objective lens turret with DIC slot
- High performance focus motion assembly
- High performance XY stage for accurate positioning and repeatability
- View Metrology Software (VMS)
- 元素软件
