Precis
Ultra High Accuracy Critical Dimension Metrology System
VIEW Precis combines the XYZ accuracy of VIEW systems with ultra-high magnification optics. Precis features a microscope objective turret and a high performance Z-axis motion assembly to provide the best possible optical focus at extreme magnifications.
The most accurate XY stage VIEW has to offer combined with the versatile yet powerful objective turret creates a metrology machine for the most demanding applications.
기준
선택 과목
XYZ 여행
200 x 200 x 50 mm
Extended X axis, 300 mm; extended Z axis, 150 mm
적재 능력
10 kg
계측 카메라
Microscope optical system with manual 5-position objective lens turret, bright field / dark field imaging
Analyzer, Polarizer, and DIC
계측 카메라
2.0 megapixel (1628 x 1236), digital, monochrome metrology camera
Color and other high-resolution camera configurations are optionally available
조명 장치
녹색 LED 동축 표면 조명 및 LED 투과 서브스테이지 조명, 소스 및 강도 프로그래밍 가능
백색 LED 동축 표면 조명 및 컬러 필터
특징
- Microscope optics with 5-position objective lens turret with DIC slot
- High performance focus motion assembly
- High performance XY stage for accurate positioning and repeatability
- View Metrology Software (VMS)
- 요소 소프트웨어
