Showerhead Inspections

Showerheads, also known as uniform gas diffusers, gas distribution plates, or gas emitters, precisely and uniformly distributes process gases into reaction chambers in semiconductor fabrication processes like etching, thin-film deposition, and plasma etching.

Showerhead surfaces feature thousands of micropores or holes to ensure that gas molecules spread out evenly across the entire wafer surface, which is critical for creating uniform and high-quality films consistently.  Small variations in those pores – for instance defects in manufacturing, or build-up of contaminants – can lead to significant defects in the final chip production and reduce overall yield.

Dimensional metrology on semiconductor showerheads is critical for ensuring uniform material deposition by measuring hole diameter, roundness, and true position.  VIEW solutions are perfect for early and accurate measurement, helping to identify and correct issues before they lead to costly waste.