Precis
Ultra High Accuracy Critical Dimension Metrology System
VIEW Precis combines the XYZ accuracy of VIEW systems with ultra-high magnification optics. Precis features a microscope objective turret and a high performance Z-axis motion assembly to provide the best possible optical focus at extreme magnifications.
The most accurate XY stage VIEW has to offer combined with the versatile yet powerful objective turret creates a metrology machine for the most demanding applications.
標準
オプション
XYZトラベル
200 x 200 x 50 mm
Extended X axis, 300 mm; extended Z axis, 150 mm
負荷容量
10 kg
計測カメラ
Microscope optical system with manual 5-position objective lens turret, bright field / dark field imaging
Analyzer, Polarizer, and DIC
計測カメラ
2.0 megapixel (1628 x 1236), digital, monochrome metrology camera
Color and other high-resolution camera configurations are optionally available
イルミネーション
緑色のLED同軸表面光とLED透過サブステージ光、光源と強度をプログラム可能
白色LED同軸表面光およびカラーフィルター
特徴
- Microscope optics with 5-position objective lens turret with DIC slot
- High performance focus motion assembly
- High performance XY stage for accurate positioning and repeatability
- View Metrology Software (VMS)
- Elementsソフトウェア
