Precis
Ultra High Accuracy Critical Dimension Metrology System
VIEW Precis combines the XYZ accuracy of VIEW systems with ultra-high magnification optics. Precis features a microscope objective turret and a high performance Z-axis motion assembly to provide the best possible optical focus at extreme magnifications.
The most accurate XY stage VIEW has to offer combined with the versatile yet powerful objective turret creates a metrology machine for the most demanding applications.
Standard
Optional
XYZ Travel
200 x 200 x 50 mm
Extended X axis, 300 mm; extended Z axis, 150 mm
Load Capacity
10 kg
Metrology Camera
Microscope optical system with manual 5-position objective lens turret, bright field / dark field imaging
Analyzer, Polarizer, and DIC
Metrology Camera
2.0 megapixel (1628 x 1236), digital, monochrome metrology camera
Color and other high-resolution camera configurations are optionally available
Illumination
Green LED coaxial surface light and LED transmitted substage light, programmable for source and intensity
White LED coaxial surface light and color filters
FEATURES
- Microscope optics with 5-position objective lens turret with DIC slot
- High performance focus motion assembly
- High performance XY stage for accurate positioning and repeatability
- View Metrology Software (VMS)
- Elements Software
